Simulation design of a subwavelength Fano-photonic ring resonator pressure sensor based on Finite Element Method
Autor: | Jing-qin Mu, Jing Wang, Miao-li Ma, Ning Ma |
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Rok vydání: | 2017 |
Předmět: |
Materials science
business.industry Finite-difference time-domain method Physics::Optics Resonance 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Pressure sensor Atomic and Molecular Physics and Optics Finite element method Electronic Optical and Magnetic Materials law.invention 010309 optics Resonator Optics Pressure measurement law 0103 physical sciences Waveguide (acoustics) Electrical and Electronic Engineering Photonics 0210 nano-technology business |
Zdroj: | Optik. 137:195-202 |
ISSN: | 0030-4026 |
DOI: | 10.1016/j.ijleo.2017.03.004 |
Popis: | A subwavelength Fano-photonic ring resonator pressure sensor is designed in this paper using Finite Element Method (FEM) and Finite Difference Time Domain (FDTD). The sensor is consisted of a PMMA photonic ring waveguide which can produce resonance spectrum to realize pressure measurement. But research shows that the resonance depth is attenuating with the increase of spectral wavelength. So a Fabry-Perot (FP) structure is introduced to the sensor to produce Fano-line shapes. The interaction between the strong trapped resonance of the FP resonator and the weak resonance of the ring resonator can improve the resonance depth to ensure measurement accuracy. After structural optimization, this sensor can realize the pressure sensitivity of 6.49286 nm/MPa and the low temperature cross-sensitivity of 0.00208 nm/°C. This pressure sensor is based on integrated photonics and has broad application prospect in pressure sensor array. |
Databáze: | OpenAIRE |
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