Fabrication of subwavelength grating based optical nano-hairs using ALD nano-patterning

Autor:	Indumathi Raghu Srimathi, Eric G. Johnson, William F. Delaney
Rok vydání:	2015
Předmět:	Atomic layer deposition Materials science Fabrication business.industry Nano Near-field optics Atom optics Physics::Optics Optoelectronics Beam shaping Dielectric Grating business
Zdroj:	2015 IEEE Photonics Conference (IPC).
DOI:	10.1109/ipcon.2015.7323679
Popis:	This paper introduces a novel concept for fabrication of subwavelength grating based beam shaping elements. The optical nano-hair structures are made from high-κ dielectrics using nano-patterning techniques and an atomic layer deposition tool.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c703f49c375cdebbb53b1f7b59aaaeab https://doi.org/10.1109/ipcon.2015.7323679 Zobrazit plný text záznamu