Monolithic integrated MEMS mirror array module towards low electrical interference

Autor:	Yoshito Jin, Tomomi Sakata, Mituo Usui, Junichi Kodate
Rok vydání:	2012
Předmět:	Microelectromechanical systems Materials science business.industry Chip Optical switch Electromagnetic interference Optics Interference (communication) Hardware_GENERAL Electrode Data_FILES Hardware_INTEGRATEDCIRCUITS Optoelectronics business Optical arrays Microfabrication
Zdroj:	2012 International Conference on Optical MEMS and Nanophotonics.
DOI:	10.1109/omems.2012.6318840
Popis:	A MEMS mirror array module monolithically integrates a MEMS mirror chip with shield walls bonded to a control electrode chip. The fabricated mirror array module successfully operates with low electrical interference.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c6de913387126848ce55d517b7d78c74 https://doi.org/10.1109/omems.2012.6318840 Zobrazit plný text záznamu