Design and Fabrication of High-Frequency Ultra-Wideband 1D CMUT Arrays for Acoustic Angiography Applications - Preliminary Results

Autor: Feysel Yalcin Yamaner, Remzi Erkan Kemal, Paul A. Dayton, Omer Oralkan, Oluwafemi J. Adelegan
Rok vydání: 2018
Předmět:
Zdroj: 2018 IEEE International Ultrasonics Symposium (IUS).
DOI: 10.1109/ultsym.2018.8579874
Popis: For superharmonic imaging applications involving the use of microbubble contrast agents, transducers that can transmit energy at low frequencies (less than 5 MHz) to excite the microbubbles, and at the same time detect scattered echoes at higher harmonics (greater than 20 MHz) are essential. We explored the advantages of a thin silicon plate with an added central mass combined with a reduced bottom electrode area to further improve the bandwidth of 1D capacitive micromachined ultrasonic transducer arrays. FEM simulation results show that the fabricated devices can transmit at low frequency (
Databáze: OpenAIRE