Multifunctional Integrated Sensors for Multiparameter Monitoring Applications

Autor:	Yushi Yang, Beth L. Pruitt, Thomas W. Kenny, Matthew A. Hopcroft, Vu A. Hong, Eldwin J. Ng, C. L. Roozeboom, Chae Hyuck Ahn, Bridget E. Hill
Rok vydání:	2015
Předmět:	Engineering Moving parts business.industry Mechanical Engineering Electro-optical sensor Electrical engineering Temperature measurement Automotive engineering Encapsulation (networking) Activity monitoring Low vacuum Wafer Electrical and Electronic Engineering business
Zdroj:	Journal of Microelectromechanical Systems. 24:810-821
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2014.2349894
Popis:	We present multifunctional integrated sensors (MFISES) that combine temperature, humidity, pressure, air speed, chemical gas, magnetic, and acceleration sensing on a single 2-mm $\times 2$ -mm die. We fabricate the MFISES in a wafer scale encapsulation process to hermetically seal the sensor functions with moving parts at low vacuum, and then surface micromachine the environmental sensors on top of the sealed layer. The encapsulation process provides very stable conditions for the pressure, magnetic, and acceleration sensors, and enables the deployment of the MFISES in dynamic environmental conditions without special postprocess packaging. We quantify the performance requirements for sensor applications in weather stations, indoor climate control, road activity monitoring, chemical sensing, and parking monitoring. We compare the performance of the MFISES to the application requirements to demon- strate the utility of an integrated sensor in a wide range of applications. [2014-0117]
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c6acf52a5b3b31fa4a6da4ab2fe32068 https://doi.org/10.1109/jmems.2014.2349894 Zobrazit plný text záznamu