Method of forming high-quality carbon-based coatings using vacuum-arc discharge

Autor: D. K. Kostrin
Rok vydání: 2021
Předmět:
Zdroj: 7TH INTERNATIONAL CONFERENCE ON X-RAY, ELECTROVACUUM AND BIOMEDICAL TECHNIQUE.
ISSN: 0094-243X
Popis: Reduction of the number of electrons leaving the surface of a grid electrode due to the secondary and thermionic emissions is possible due to the application of a special antiemission coating providing a higher work function from the electrode working surface. The decrease in the rate of flow of the diffusion processes between the base material of a grid electrode and material of an antiemission coating is achieved through the use of multilayer structures. For their formation the technological processes are used that lead to the formation of surface carbide compounds. For controlling the quality of the generated coatings and obtaining the necessary structures a method of controlled delivery of carbon is used when applying on a substrate a pulse-periodic effect.
Databáze: OpenAIRE