Focused ion beam direct micromachining of DOEs

Autor:	Frank T. Hartley, Chantal G. Khan Malek, Jayant Neogi
Rok vydání:	2000
Předmět:	Diffraction Materials science business.industry chemistry.chemical_element Liquid metal ion source Focused ion beam Surface micromachining Optics chemistry Etching (microfabrication) X-ray lithography Gallium business Lithography
Zdroj:	Micro-Opto-Electro-Mechanical Systems.
ISSN:	0277-786X
DOI:	10.1117/12.397932
Popis:	We discuss here the capability of direct manufacture of various high- resolution diffractive optics, in particular regarding micromachining of DOEs in 3D. Preliminary demonstrations were made in 2-D using an automated FIB system operated at 30 KeV with a Gallium liquid metal ion source and equipped with a gas injection system (GIS). Gratings with a 20 nm line width and zone plates with 32 nm outer ring were milled in a reactive atmosphere (iodine) directly through 3.5 (mu) m and 800 nm of gold respectively. Plans for combining FIB and X-ray lithography to make diffractive optical elements (DOEs) for JPL are also mentioned.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c62c72ca141ce6a666a18f1452dc0b4c https://doi.org/10.1117/12.397932 Zobrazit plný text záznamu