Autor: |
Kailash Gopalakrishnan, R. S. King, B. N. Kurdi, R. S. Shenoy, H. K. Wickramasinghe, Charles T. Rettner, L.D. Bozano |
Rok vydání: |
2006 |
Předmět: |
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Zdroj: |
2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers.. |
DOI: |
10.1109/vlsit.2006.1705256 |
Popis: |
For the first time, we demonstrate sublithographic memory read/write operation using micro to nano addressing block (MNAB) decoders. Test structures are fabricated with integrated one-time programmable oxide ROM elements addressed using MNAB devices that have 4 sub-50 nm silicon fins at 140 nm period. Functional operation is obtained for all 4-bit ROM sequences and over different ROM cell areas |
Databáze: |
OpenAIRE |
Externí odkaz: |
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