Understanding and Improving Virtual Metrology Systems Using Bayesian Methods

Autor:	Christopher I. Lang, Fan-Keng Sun, Ramana Veerasingam, John Yamartino, Duane S. Boning
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Transactions on Semiconductor Manufacturing. 35:511-521
ISSN:	1558-2345 0894-6507
DOI:	10.1109/tsm.2022.3170270
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c5f4a88cd2dd4517bdd0841e6ccf271c https://doi.org/10.1109/tsm.2022.3170270 Zobrazit plný text záznamu