Advancement of MEMS into RF-filter applications

Autor: W. Nessler, Juha Ellä, H.-J. Timme, Robert Aigner, Stephan Marksteiner, Lueder Elbrecht
Rok vydání: 2003
Předmět:
Zdroj: Digest. International Electron Devices Meeting.
Popis: RF-MEMS filters will substitute conventional filters in mobile communication under certain technical and commercial conditions. Key performance parameters and requirements are discussed in detail. Two different approaches for RF-MEMS filters are reviewed and compared: Electric field driven MEMS-resonators and piezoelectric MEMS resonators. State-of-the-art RF-MEMS filters based on bulk-acoustic-wave (BAW) resonators are presented.
Databáze: OpenAIRE