Some characteristics of an inverted magnetron cold cathode ionization gauge with dual feedthroughs

Autor:	N. T. Peacock, R. N. Peacock
Rok vydání:	1988
Předmět:	Chemistry Analytical chemistry Feedthrough Surfaces and Interfaces Condensed Matter Physics Cathode Surfaces Coatings and Films law.invention Anode Pressure measurement law Torr Ionization Hot-filament ionization gauge Cold cathode Atomic physics
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 6:1141-1144
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.575662
Popis:	Single feedthrough cold cathode ionization gauges often suffer from spurious currents due to insulator leakage and field emission which mask the small pressure dependent ionization currents. This paper describes an inverted magnetron gauge tube designed to reduce these problems by using separate feedthroughs for the anode high voltage and the cathode current. The cathode is insulated from the grounded metal envelope. This gauge is useful for pressure measurement from 10−4 to 10−10 Torr in the constant voltage mode and from 10−2 to 10−6 Torr in the constant current mode. The characteristic curves typically show a change of slope at ∼10−9 Torr. When used at a magnetic field of 1200 G the slope above the inflection point is 1.08±0.02, while below it the slope varies from 1.4–1.9. It was found that operating the gauge for some time at a pressure of 10−4 Torr does not change the curve above the inflection point, but can alter the lower portion temporarily.
Databáze:	OpenAIRE
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