Determination of Atomic Oxygen Concentrations in Glow Discharges of Oxygen and Carbon Dioxide

Autor: Kei Hozumi, Takako Mano, Toshiaki Tatsuta, Mikio Sawai, Osamu Tsuji
Rok vydání: 1992
Předmět:
Zdroj: Analytical Letters. 25:1365-1371
ISSN: 1532-236X
0003-2719
DOI: 10.1080/00032719208016134
Popis: Concentrations of atomic oxygen produced in glow discharges of oxygen and carbon dioxide both of which were useful for low-temperature ashing of organic materials were determined by gas titration technique. The atonic oxygen concentration in the flowing oxygen plasma was approximately 60% (v/v) at the point of 10cm downstream from a resonance coil to which 30W RF power (13.56MHz) was supplied, while the carbon dioxide plasma produced 10% lower concentration at the same plasma conditions.
Databáze: OpenAIRE