| Autor: |
肖风华 Xiao Fenghua, 陈家凤 Chen Jiafeng |
| Rok vydání: |
2012 |
| Předmět: |
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| Zdroj: |
Optical Technique. 38:185-190 |
| ISSN: |
1002-1582 |
| DOI: |
10.3788/gxjs20123802.0185 |
| Popis: |
A computer-controlled stroboscopic interferometer technique for measuring surface shape map and out-of-plane-deflections and static voltage versus displacement curve and resonant frequency is introduced.In-plane displacement of MEMS deformable mirrors is measured using the stroboscopic imaging and the computer microvision system and technique of sub-pixel location based on least-square curved surface fitting algorithm.The techniques of stroboscopic imaging and a five-step phase-shifting interferometer are used to obtain wrapped phase.The phase unwrapping algorithm is established to recover true phase which stands for object surface height.Consequently,the static and dynamic characteristics of MEMS deformable mirrors are obtained.The testing results show that the stroboscopic interferometer technique has the advantages of fast measuring speed and high measuring accuracy and realizing automatic control easily. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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