Luminescence of hafnium dioxide films produced from hafnium dipivaloylmethanate

Autor: A. A. Rastorguev, V. I. Belyi
Rok vydání: 2007
Předmět:
Zdroj: Russian Physics Journal. 50:374-378
ISSN: 1573-9228
1064-8887
DOI: 10.1007/s11182-007-0051-2
Popis: A technique is developed for measuring luminescence spectra of hafnium dioxide using a hydrogen lamp as an excitation source. The luminescence spectra of the as-grown and annealed hafnium dioxide films prepared by chemical deposition from volatile hafnium dipivaloylmethanate on the Si(111) substrates are measured at room temperature. Intense luminescence at λ ≌ 280 nm is characteristic of nanocrystallites of monoclinic modification. The band gap width is found to be ≌ 5.76 eV. It is shown that the film composition significantly deviates from the stoichiometric one.
Databáze: OpenAIRE