Design and characterization of Screen-Printed Piezoresistive Cantilever for Gas Sensor Application

Autor:	Naouras Saleh, Nursabirah Jamel, Illani Mohd Nawi
Rok vydání:	2022
Předmět:	History Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 2312:012013
ISSN:	1742-6596 1742-6588
Popis:	In this paper, the design, and the characterization of screen-printed cantilever-based humidity sensor are described. The project investigated in detail the sensitivity, and fabrication process of screen-printing based sensor with coated active humidity material on cantilever’s free end. The main aim of this paper is to compare the screen-printed technology with other existing technologies like micro-electro-mechanical system (MEMS), and low temperature cofired circuit (LTCC). The sensor has been simulated under different level of relative humidity with two different temperature value: 35°C, and 45°C. This paper also represents an analytical and mathematical modeling approach for frequency shift and thick film resistance change of the selected sensor. The analytical results are compared with the simulated results.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c54f87126f6b4b9b3d872fc1d2b77121 https://doi.org/10.1088/1742-6596/2312/1/012013 Zobrazit plný text záznamu