Shape Memory Alloy Actuators for Silicon Microgrippers
| Autor: | Tom Zimmermann, Andreas Dietzel, Mayra Garcés-Schröder, Carsten Siemers, Monika Leester-Schädel, Markus Böl |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Fabrication Materials science Laser ablation Silicon business.industry Mechanical Engineering Process (computing) chemistry.chemical_element 02 engineering and technology Shape-memory alloy 021001 nanoscience & nanotechnology 01 natural sciences chemistry Nickel titanium 0103 physical sciences Optoelectronics Electrical and Electronic Engineering 0210 nano-technology Actuator Material properties business |
| Zdroj: | Journal of Microelectromechanical Systems. 28:869-881 |
| ISSN: | 1941-0158 1057-7157 |
| Popis: | The fabrication of shape memory alloy NiTi actuators by femtosecond laser ablation is presented. Processing parameters are examined and the effect of the ablation process on the shape memory material properties is assessed by electron microscopy and differential scanning calorimetry. It is shown that an efficient ablation process with negligible effect on the shape memory properties of the actuator material has been established with a cutting time of ~3 min per actuator. Two different actuator geometries are studied and their performances are compared by measurements of actuator stroke, force and resistance characteristics. A preconditioning procedure for stabilization of the resistance is presented, permitting an actuator control based on the intrinsic sensor effect. A wafer-level integration process of the actuators into silicon microgrippers is described. [2019-0032] |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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