0.4 μm spatial resolution with 1 GHz (λ=30 cm) evanescent microwave probe

Autor:	Massood Tabib-Azar, A. Pohar, D.-P. Su, George E. Ponchak, Steven R. LeClair
Rok vydání:	1999
Předmět:	Scanning Hall probe microscope Superlens Materials science business.industry Physics::Optics law.invention Scanning probe microscopy Optics Microwave imaging Optical microscope law Near-field scanning optical microscope Scanning tunneling microscope business Instrumentation Image resolution
Zdroj:	Review of Scientific Instruments. 70:1725-1729
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1149658
Popis:	In this article we describe evanescent field imaging of material nonuniformities with a record resolution of 0.4 μm at 1 GHz (λg/750 000), using a resonant stripline scanning microwave probe. A chemically etched tip is used as a point-like evanescent field emitter and a probe–sample distance modulation is employed to improve the signal-to-noise ratio. Images obtained by evanescent microwave probe, by optical microscope, and by scanning tunneling microscope are presented for comparison. Probe was calibrated to perform quantitative conductivity measurements. The principal factors affecting the ultimate resolution of evanescent microwave probe are also discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c4e86bdf6160a9c55cfa87cf2391d0a5 https://doi.org/10.1063/1.1149658 Zobrazit plný text záznamu