Quality Factor in Polycrystalline Diamond Micromechanical Flexural Resonators

Autor:	Amir Heidari, Hadi Najar, David A. Horsley, Liwei Lin, Chen Yang
Rok vydání:	2015
Předmět:	Cantilever Materials science Mechanical Engineering Diamond engineering.material law.invention Resonator Microcrystalline Quality (physics) Flexural strength law Q factor engineering Electronic engineering Electrical and Electronic Engineering Composite material Tuning fork
Zdroj:	Journal of Microelectromechanical Systems. 24:2152-2160
ISSN:	1941-0158 1057-7157
Popis:	This paper reports an investigation into the various dissipation mechanisms that can affect polycrystalline diamond micromechanical resonators. Double-ended tuning fork and cantilever resonators were fabricated from 1–5- $\mu \text{m}$ thick microcrystalline diamond films. It is shown that the quality factor of the low frequency ( N 2 for various times up to 660 min is used to modify the resonator surface and is shown to result in a threefold increase in quality factor up to 365 000 at 26.6 kHz. [2015-0094]
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c4d50351bdbbbeca9d5fe3a368f0d62b https://doi.org/10.1109/jmems.2015.2478802 Zobrazit plný text záznamu