Pregrooved Disk Formed by Dry Etching Technique

Autor:	Akira Iwasawa, Hiroki Yamazaki, Masami Miyagi
Rok vydání:	1987
Předmět:	Optics Materials science business.industry General Engineering General Physics and Astronomy Optoelectronics Dry etching Substrate (electronics) Silicon oxide business Signal Groove (music) Smooth surface
Zdroj:	Japanese Journal of Applied Physics. 26:83
ISSN:	1347-4065 0021-4922
DOI:	10.7567/jjaps.26s4.83
Popis:	A pregrooved disk is fabricated by dry etching of the silicon oxide film deposited on the glass substrate. The disk has a uniform groove depth and a smooth surface, which enables stable tracking operations and high quality playback of prepits signal.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c4c8eccbc95851af647c8ebe855b720f https://doi.org/10.7567/jjaps.26s4.83 Zobrazit plný text záznamu