Quantitative analysis of thin foils using backscattering measurements. [He implants in Pd; composite Al/parylene]

Autor:	L. R. Mervine, R. J. Fortner, R. C. Der, J. M. Khan, T. M. Kavanagh
Rok vydání:	1971
Předmět:	inorganic chemicals Materials science genetic structures Scattering Composite number Analytical chemistry chemistry.chemical_element Alpha particle chemistry.chemical_compound Ion implantation chemistry Parylene Aluminium Elemental analysis Composite material FOIL method
Popis:	Backscattering of 1.25-MeV protons and alpha particles from thin foils is used for a nondestructive quantitative elemental analysis of thin foils. The detection of helium that had previously been implanted into a 1350 A palladium foil and the analysis of a composite aluminum and parylene foil are presented as examples of this technique.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c4b936058127757459a744f2c423cb6d https://doi.org/10.2172/7361608 Zobrazit plný text záznamu