Nanostructuring of sapphire using time-modulated nanosecond laser pulses
| Autor: | Lukas Bayer, Martin Ehrhardt, Klaus Zimmer, Igor Zagoranskiy, Pierre Lorenz |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science business.industry Far-infrared laser Pulse duration 02 engineering and technology Dielectric 021001 nanoscience & nanotechnology Laser 01 natural sciences Fluence law.invention Optics law Etching 0103 physical sciences Sapphire 0210 nano-technology business Layer (electronics) |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| Popis: | The nanostructuring of dielectric surfaces using laser radiation is still a challenge. The IPSM-LIFE (laser-induced front side etching using in-situ pre-structured metal layer) method allows the easy, large area and fast laser nanostructuring of dielectrics. At IPSM-LIFE a metal covered dielectric is irradiated where the structuring is assisted by a self-organized molten metal layer deformation process. The IPSM-LIFE can be divided into two steps: STEP 1: The irradiation of thin metal layers on dielectric surfaces results in a melting and nanostructuring process of the metal layer and partially of the dielectric surface. STEP 2: A subsequent high laser fluence treatment of the metal nanostructures result in a structuring of the dielectric surface. At this study a sapphire substrate Al 2 O 3 (1-102) was covered with a 10 nm thin molybdenum layer and irradiated by an infrared laser with an adjustable time-dependent pulse form with a time resolution of 1 ns (wavelength λ = 1064 nm, pulse duration Δt p = 1 – 600 ns, Gaussian beam profile). The laser treatment allows the fabrication of different surface structures into the sapphire surface due to a pattern transfer process. The resultant structures were investigated by scanning electron microscopy (SEM). The process was simulated and the simulation results were compared with experimental results. |
| Databáze: | OpenAIRE |
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