Advanced thick film system for AlN substrates

Autor: R. J. Bacher, D. K. Anderson, A. F. Carroll, J. D. Smith, Christopher R. Needes, Y. L. Wang, Yong Soo Cho, J. C. Crumpton
Rok vydání: 2003
Předmět:
Zdroj: Microelectronics International. 20:48-51
ISSN: 1356-5362
DOI: 10.1108/13565360310455535
Popis: Substrates with high thermal conductivity continue to be in great demand for their ability to enable smaller and denser high power circuits. BeO has been used for this purpose for many years with thick film materials. However, due to health and environmental concerns with BeO, many manufacturers feel compelled to switch to alternative substrates. This paper will discuss a thick film system consisting of conductors, dielectric, and resistors developed specifically for use with the most likely alternative, AlN substrates. This system will soon find broad use in applications such as power resistors for telecom, optoelectronic submounts, and high‐power automotive applications.
Databáze: OpenAIRE