Sputter-Deposition of [111]-Axis Oriented Rhombohedral PZT Films and Their Dielectric, Ferroelectric and Pyroelectric Properties

Autor:	Takehiro Yamada, Tadashi Shiosaki, Matsuzaki Tokuo, Akira Kawabata, Masatoshi Adachi
Rok vydání:	1987
Předmět:	Materials science business.industry Poling General Engineering General Physics and Astronomy Mineralogy Dielectric Sputter deposition Ferroelectricity Pyroelectricity Sputtering Optoelectronics Thin film business Pyroelectric crystal
Zdroj:	Japanese Journal of Applied Physics. 26:550
ISSN:	1347-4065 0021-4922
DOI:	10.1143/jjap.26.550
Popis:	[111]-oriented PZT films have been successfully grown with good epitaxy onto epitaxial platinum film substrates by the rf-magnetron sputtering method using Pb enriched PZT(90/10) targets. The sputtering conditions for growing epitaxial films were investigated. Crystallographic identifications of the films were made by the X-ray and RHEED measurements. Dielectric, ferroelectric and pyroelectric properties of these films were measured. Pyroelectric coefficients at room temperature were determined as 45 and 3×10-9 C/cm2 K for epitaxial PZT films with poling and without poling treatments, respectively. Epitaxial PZT films sputtered on Pt/sapphire possess desirable properties for potential applications to pyroelectric devices.
Databáze:	OpenAIRE
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