Ablation of LiF and CsI by EUV Nanosecond Laser Pulse
Autor: | Karel Kolacek, Andrei Choukourov, Oleksandr Frolov, Jiri Schmidt, P. Pira, Jaroslav Straus |
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Rok vydání: | 2018 |
Předmět: |
010302 applied physics
Materials science Laser ablation business.industry Extreme ultraviolet lithography medicine.medical_treatment Lithium fluoride Nanosecond Laser Ablation 01 natural sciences law.invention 010309 optics chemistry.chemical_compound Wavelength Optics chemistry law 0103 physical sciences medicine Irradiation business |
Zdroj: | Springer Proceedings in Physics ISBN: 9783319730240 |
DOI: | 10.1007/978-3-319-73025-7_49 |
Popis: | In this chapter, we present results of study an interaction of nanosecond EUV laser pulses at a wavelength of 46.9 nm with lithium fluoride (LiF), caesium iodide (CsI) and golden (Au) samples. The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on samples. Samples were irradiated with 1, 2, 5, 10 and 20 laser shots with various energies. At the same time, laser ablation plumes were observed. Ablation depth of craters was analysed by atomic force microscope (AFM). |
Databáze: | OpenAIRE |
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