Achieving ultrahigh vacuum in an unbaked chamber with glow discharge conditioning

Autor:	Pratibha Semwal, Ziauddin Khan, Kalpesh R Dhanani, Dilip C Raval, Subrata Pradhan
Rok vydání:	2016
Předmět:	Glow discharge Materials science chemistry Hydrogen General Physics and Astronomy chemistry.chemical_element Conditioning Test chamber Working pressure Composite material Current density Helium
Zdroj:	Pramana. 88
ISSN:	0973-7111 0304-4289
Popis:	Glow discharge conditioning (GDC) has long been accepted as one of the basic wall conditioning techniques for achieving ultrahigh vacuum in an unbaked chamber. As a part of this fundamental experimental study, a test chamber has been fabricated from stainless steel 304 L with its inner surface electropolished on which a detailed investigation has been carried out. Both helium and hydrogen gases have been employed as discharge cleaning medium. The discharge cleaning was carried out at 0.1 A /m 2 current density with working pressure maintained at 1.0 × 10 -2 mbar. It was experimentally observed that the pump-down time to attain the base pressure ~10 -8 mbar was reduced by 62% compared to the unbaked chamber being pumped to this ultimate vacuum. The results were similar irrespective of whether the discharge cleaning medium is either hydrogen or helium. It was also experimentally established that a better ultimate vacuum could be achieved as compared to theoretically calculated ultimate vacuum with the help of discharge cleaning.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c4777ad90fd67c6b5083fd45aa8164e4 https://doi.org/10.1007/s12043-016-1322-7 Zobrazit plný text záznamu Full text from SpringerLink