Nanoscale Chemical-Mechanical Characterization of Nanoelectronic Low-kDielectric/Cu Interconnects

Autor:	Kevin Kjoller, Alexandre Dazzi, Craig Prater, Michael K. F. Lo, Qichi Hu, Eoghan Dillon, Curtis Marcott, Sean W. King
Rok vydání:	2015
Předmět:	010302 applied physics Materials science 0103 physical sciences Low-k dielectric Nanotechnology 02 engineering and technology 021001 nanoscience & nanotechnology 0210 nano-technology 01 natural sciences Nanoscopic scale Electronic Optical and Magnetic Materials Characterization (materials science)
Zdroj:	ECS Journal of Solid State Science and Technology. 5:P3018-P3024
ISSN:	2162-8777 2162-8769
DOI:	10.1149/2.0041604jss
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c448c7fac6c20400f7c2419bae54b4c7 https://doi.org/10.1149/2.0041604jss Zobrazit plný text záznamu