Processing circuits of weak capacitance signal for spherical scattering electrical-field probing sensor
| Autor: | Tan Jiu-bin, Zhao Yamin, Lu Yesheng, Bian Xingyuan, Cui Junning |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Materials science
business.industry Scattering Isotropy 02 engineering and technology 021001 nanoscience & nanotechnology Capacitance Nonlinear system 020303 mechanical engineering & transports Optics 0203 mechanical engineering Measuring principle Nanometre Signal processing circuits 0210 nano-technology business Electronic circuit |
| Zdroj: | 2019 14th IEEE International Conference on Electronic Measurement & Instruments (ICEMI). |
| DOI: | 10.1109/icemi46757.2019.9101549 |
| Popis: | A spherical scattering electrical-field probe(SSEP) with noncontact, 3D isotropy and approximate point probing characteristics has been proposed for high-precision measurement of micro and small structures with large aspect ratio. Development of signal processing circuits for detection of weak cpacitantive signal on sub-picofarad level is the key to realize nanometer resolution. In this paper, a set of signal processing circuits based on operational capacitance measurement principle is proposed, and characteristics of the circuits are theorically analyzed and optimized. Experimental results indicates that resolution of 1 nm and nonlinearity of6 nm are achieved with the proposed signal processing circuits for a SSEP with $\phi$ 2.5 mm probing ball. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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