Physico-Chemical and Spectroscopic Study of AlN Powder as a High-Tech Material for Microelectronics Dielectric Substrates

Autor:	T. Petrov, I. Markova-Deneva, I. Denev
Rok vydání:	2011
Předmět:	Materials science business.industry Optoelectronics Microelectronics Nanotechnology Dielectric business
Zdroj:	Proceedings of the 8th International Conference on Multi-Material Micro Manufacture.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c4310d68e827b60d01e03937b2797dbd https://doi.org/10.3850/978-981-07-0319-6_195 Zobrazit plný text záznamu