Electromigration studies using in situ TEM electrical resistance measurements
| Autor: | Y.C. Lee, C. Y. Chang, A. J. Patrinos, V. D. Vankar, R.W. Vook, J.A. Schwarz |
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| Rok vydání: | 1990 |
| Předmět: |
Hot stage
In situ Materials science Video tape Analytical chemistry chemistry.chemical_element Condensed Matter Physics Electromigration Surfaces Coatings and Films In situ transmission electron microscopy Electrical resistance and conductance chemistry Aluminium Thin film Composite material Instrumentation |
| Zdroj: | Vacuum. 41:1434-1436 |
| ISSN: | 0042-207X |
| DOI: | 10.1016/0042-207x(90)93981-n |
| Popis: | An in situ transmission electron microscopy (TEM) method has been devised for the measurement of electrical resistance as a function of temperature and/or time for thin film stripes. A custom TEM sample holder was fabricated through which up to eight leads may be passed. These leads provide currents to the heater and allow for the measurement of hot stage temperature and the electrical resistance of the sample. This configuration enables one to correlate changes in resistance of the stripe during electromigration experiments to the microstructural changes occurring at the same time. The time-dependent microstructural phenomena are recorded with a camcorder on video tape, a capability which greatly enhances the subsequent data analysis. Preliminary experiments have been performed using the Temperature-ramp Resistance Analysis to Characterize Electromigration (TRACE) method in order to determine the kinetic parameters for electromigration for pure aluminum films. |
| Databáze: | OpenAIRE |
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