Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures
| Autor: | Yoshihiko Hirai, Tomoaki Osumi, Toshiaki Tanaka, Masaaki Yasuda, Masaru Sasago |
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| Rok vydání: | 2023 |
| Zdroj: | Novel Patterning Technologies 2023. |
| DOI: | 10.1117/12.2658128 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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