Generation of microstructures in silicon for MEMS applications

Autor: Amita Gupta, Ranvir Singh, D. S. Ahuja, Mahnder. Pal, Punita Puri
Rok vydání: 1998
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.305550
Popis: Excellent mechanical properties of silicon together with the advantage of fabrication of the IC circuitary on the same chip make it a very viable material for sensors. Thin membranes and diaphragms generated in crystalline silicon form an integral part of many micromechanical systems. In this paper, comparison of various techniques for bulk micromachining of silicon to create new structures is discussed. A new technique based on porous silicon formation using selective anodization is presented which is useful for generating different patterns required for making sensor arrays.
Databáze: OpenAIRE
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