Ultrashort-pulse laser micro-polishing of lithium niobate by using UV-ps pulses

Autor:	Johannes A. L'huillier, Mareike Schäfer
Rok vydání:	2020
Předmět:	Fabrication Materials science business.industry medicine.medical_treatment Lithium niobate Polishing Ablation Laser Pulse (physics) law.invention chemistry.chemical_compound chemistry law medicine Surface roughness Optoelectronics business Ultrashort pulse laser
Zdroj:	Laser-based Micro- and Nanoprocessing XIV.
Popis:	We present a new fabrication method to realize smooth structures in lithium niobate. Therefore a detailed study on laser micro-polishing using ultrashort laser pulses is carried out by separating the effects of spatial pulse overlap and temporal pulse overlap. The adventage of this approach is the smoothing of the processed area by a simultaneous ablation. That will allow ablation depths between 1 µm and 4 µm with rms-roughness values of ≈20 nm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c3e1ed1e256147e6a93cb31bb2fa2b82 https://doi.org/10.1117/12.2546493 Zobrazit plný text záznamu