LIGA fabrication and test of a DC type magnetohydrodynamic (MHD) micropump
| Autor: | Wanjun Wang, Z.-G. Ling, L. Huang, Kun Lian, Michael C. Murphy |
|---|---|
| Rok vydání: | 2000 |
| Předmět: |
Engineering
business.industry Direct current Mechanical engineering Micropump Condensed Matter Physics Electronic Optical and Magnetic Materials symbols.namesake Hardware and Architecture Magnet Electroforming symbols Magnetohydrodynamic drive Electrical and Electronic Engineering Magnetohydrodynamics business LIGA Lorentz force |
| Zdroj: | Microsystem Technologies. 6:235-240 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | This paper reports a research effort to design, microfabricate and test a DC type magnetohydrodynamic (MHD) micropump using LIGA method (Menz et al., 1991). The micropump is driven using the Lorentz force and can be used to deliver electrically conductive fluids. In operation, a DC voltage is supplied across the electrodes to generate the distributed body force on the fluid in the pumping chamber, and therefore a constant pressure difference along the pumping chamber. The external magnetic field was supplied using permanent magnets. The major advantage of a MHD-based micropump is that it does not contain any moving parts. It may have potential applications in medicine delivery, biological and biomedical studies. The test of the DC prototype micropump shows that bubble generation mechanism affect the performance significantly and an AC driving mechanism may be used to improve the performance. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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