Application of aspheric technique in immersion lithography lighting system

Autor:	王丽 Wang Li, 赵迎 Zhao Ying, 董连和 Dong Lian-he, 李美萱 Li Meixuan
Rok vydání:	2017
Předmět:	Optics Materials science Space and Planetary Science business.industry Aerospace Engineering Lighting system Electrical and Electronic Engineering business Atomic and Molecular Physics and Optics Immersion lithography
Zdroj:	Infrared and Laser Engineering. 46:1118003
ISSN:	1007-2276
DOI:	10.3788/irla201746.1118003
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c3c31f78be120357a3de45a5f6b9cb87 https://doi.org/10.3788/irla201746.1118003 Zobrazit plný text záznamu