Innovative Solutions for the Nanoscale Packaging of Silicon-Based and Biological Nanowires: Development of a Generic Characterization and Integration Platform
| Autor: | Christophe Brun, Xavier Baillin, Aurelie Thuaire, Delphine Sordes, Corentin Carmignani, Emmanuel Rolland, Patrick Reynaud, Severine Cheramy, Gilles Poupon |
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| Rok vydání: | 2016 |
| Předmět: |
Interconnection
Fabrication Computer science business.industry Integration platform Nanowire Nanotechnology 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Industrial and Manufacturing Engineering 0104 chemical sciences Electronic Optical and Magnetic Materials Characterization (materials science) Nanoelectronics Microelectronics Electronics Electrical and Electronic Engineering 0210 nano-technology business |
| Zdroj: | IEEE Transactions on Components, Packaging and Manufacturing Technology. 6:1804-1814 |
| ISSN: | 2156-3985 2156-3950 |
| DOI: | 10.1109/tcpmt.2016.2633420 |
| Popis: | With their attractive intrinsic properties, such as morphology, autoassembling properties, and tailorability, nano-objects could provide alternative and innovative routes to current microelectronics and nanoelectronics. Further insight on their electrical properties, especially in terms of statistics and reproducibility, as well as on their potential integration into silicon-based electronics is, however, often required to be able to fully exploit their potential. This paper proposes an innovative approach using a generic structure allowing the study of nano-objects electrical properties. Regarding the nano-objects integration, a homogeneous approach is presented with the in situ fabrication of atomic wires as a possible planar interconnection system. A heterogeneous approach is described as well with the characterization and preliminary integration of biological material, such as deoxyribonucleic acid-based nanowires or amyloid fibers. |
| Databáze: | OpenAIRE |
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