Ion scattering and Auger electron spectrometry of superconducting ’’Nb3Ge’’ sputtered films

Autor:	Luis L. Tongson, Donald A. Rogowski, Bruce E. Knox
Rok vydání:	1976
Předmět:	Auger electron spectroscopy Neon Lattice constant Materials science chemistry Sputtering Analytical chemistry General Physics and Astronomy chemistry.chemical_element Electron microprobe Thin film Mass spectrometry Electron spectroscopy
Zdroj:	Journal of Applied Physics. 47:5059-5063
ISSN:	1089-7550 0021-8979
Popis:	Low‐energy ion scattering spectrometry (ISS) in conjunction with Auger electron spectrometry (AES) has been applied to the analysis of a series of superconducting ’’Nb3Ge’’ thin films deposited on alumina substrates by rf sputtering. ISS was used to determine the Nb/Ge ratio as a function of depth, while AES in combination with ISS was used to determine the impurities. No gradients in composition with depth were observed except in a thin (∼13% of the film thickness) niobium‐deficient region near the film‐alumina interface. The applicability of ISS to quantitative measurements of the Nb/Ge ratio was shown by comparing the variation of this ratio with lattice parameter a0 with a similar analysis performed on the same samples using electron microprobe (EMP) measurements on the Nb and Ge composition. Comparison of the Nb/Ge ratio determined by ISS with EMP data showed that no preferential sputtering of Ge from the films occurred during neon ion bombardment. The variation of Tc with the Nb/Ge ratios determined...
Databáze:	OpenAIRE
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