| Autor: |
L. Cergel, O.-J. Hagel, Mats Robertsson, A. Dabek, R. Buestrich, Michael Popall, S. Valizadeh, M. Schaub, R. Nagel, D. Lambert |
| Rok vydání: |
2000 |
| Předmět: |
|
| Zdroj: |
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals. 354:123-142 |
| ISSN: |
1058-725X |
| DOI: |
10.1080/10587250008023608 |
| Popis: |
Hybrid inorganic-organic polymers (ORMOCER®s) have been developed and tested for evaluation in optical and electrical interconnection technology. The photopatternable materials with negative resist behaviour are composed of inorganic oxidic structures cross-linked or substituted by organic groups. They are prepared from organosilane precursors by sol-gel-processing in combination with organic crosslinking of polymerizable organic functions. As a result of these functionalities the properties of the ORMOCER®s can be adjusted to particular applications. Systematic variation of composition combined with adaptation to micro system technology allows great flexibility in processing. The main features of these materials are: Combined use as dielectric and passivation layers in electrical systems and devices as well as core and cladding for optical applications enables e/o applications with high integration levels. Postbaking at moderate temperatures (120°C – 170°C) enables processing on low-cost substra... |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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