New Generation of Structures Obtained by Direct Wafer Bonding of Processed Wafers
| Autor: | Bernard Aspar, Chrystelle Lagahe-Blanchard |
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| Rok vydání: | 2006 |
| Zdroj: | ECS Meeting Abstracts. :1355-1355 |
| ISSN: | 2151-2043 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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