Low-Energy Broad-Beam Sputter Deposition of TiNx Thin Films

Autor:	Ž. Bogdanov, Slavica Zec, B. Goncić, M. Zlatanović, N. Popović
Rok vydání:	2002
Předmět:	Carbon film Materials science Low energy Mechanics of Materials business.industry Mechanical Engineering Optoelectronics General Materials Science Sputter deposition Thin film Condensed Matter Physics business Beam (structure)
Zdroj:	Materials Science Forum. 413:159-164
ISSN:	1662-9752
DOI:	10.4028/www.scientific.net/msf.413.159
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c325c34db3a8af717ef50714960b6c1c https://doi.org/10.4028/www.scientific.net/msf.413.159 Zobrazit plný text záznamu