On-Wafer Characterization of Varactor Using Resonating Microprobes

Autor:	Spartak Gevorgian, Andrei Vorobiev, Anatoli Deleniv
Rok vydání:	2008
Předmět:	Coupling Accuracy and precision Radiation Materials science Acoustics Condensed Matter Physics law.invention Capacitor Resonator law Electronic engineering Equivalent circuit Electrical and Electronic Engineering Varicap Electrical impedance Uncertainty analysis
Zdroj:	IEEE Transactions on Microwave Theory and Techniques. 56:1105-1111
ISSN:	1557-9670 0018-9480
DOI:	10.1109/tmtt.2008.921283
Popis:	An uncertainty analysis is developed for one-port Q-factor measurements. It is shown that better than 2% measurement accuracy is expected for high-Q resonators provided that the coupling is close to the critical. The developed uncertainty analysis is then used to define the measurement accuracy of the resonance technique, which is introduced here for on-wafer characterization of high-Q varactors. The approach is simple and is more accurate if compared to broadband impedance measurements. The utility/validity of the proposed approach is demonstrated via measurements of the test varactors based on thin BSTO film.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c3115d89a1070890d1da2096344cc111 https://doi.org/10.1109/tmtt.2008.921283 Zobrazit plný text záznamu