| Autor: |
Tetsuji Onuki, Takahiro Yamamoto, Hajime Ichikawa, Takashi Gemma, T. Umeda, Fukuda Yusuke, Shigeru Nakayama |
| Rok vydání: |
2005 |
| Předmět: |
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| Zdroj: |
Initiatives of Precision Engineering at the Beginning of a Millennium ISBN: 0792374142 |
| Popis: |
This paper describes null interferometry at 1nm accuracy for testing aspherical surfaces of sub-mm deviation from the best fitting sphere. We have developed the two kinds of null compensators. The one was the null lens composed of almost “perfect” spherical surfaces and homogeneous glass. The other was the zone plate manufactured through the lithography process. The measurement results using these null compensators were compared with the results by the ultra-precision CMM (Coordinate Measuring Machine). These three measurements differed only by an amount of 1.6nm rms. This result proved the accuracy of our null interferometry was almost 1nm rms. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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