Peculiarities of graphene layer formation from amorphous carbon and silicon-carbon films
Autor: | G. S. Rychkov, E. Z. Khamdokhov, M. L. Shupegin, E. S. Chernyavskaya, E. P. Kirilenko, A. A. Shchekin, G. N. Petrukhin, O. A. Sakharov, E. A. Il’ichev |
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Rok vydání: | 2014 |
Předmět: | |
Zdroj: | Technical Physics Letters. 40:52-54 |
ISSN: | 1090-6533 1063-7850 |
DOI: | 10.1134/s1063785014010234 |
Popis: | Graphene layers on device structures have been formed from amorphous carbon and silicon-carbon films using a sequence of technological procedures, including thermodiffusion of carbon atoms, their accumulation at the heteroboundary between layers with significantly different diffusion coefficients, and subsequent phase transition from a carbon quasi-liquid to graphene layer. |
Databáze: | OpenAIRE |
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