Peculiarities of graphene layer formation from amorphous carbon and silicon-carbon films

Autor: G. S. Rychkov, E. Z. Khamdokhov, M. L. Shupegin, E. S. Chernyavskaya, E. P. Kirilenko, A. A. Shchekin, G. N. Petrukhin, O. A. Sakharov, E. A. Il’ichev
Rok vydání: 2014
Předmět:
Zdroj: Technical Physics Letters. 40:52-54
ISSN: 1090-6533
1063-7850
DOI: 10.1134/s1063785014010234
Popis: Graphene layers on device structures have been formed from amorphous carbon and silicon-carbon films using a sequence of technological procedures, including thermodiffusion of carbon atoms, their accumulation at the heteroboundary between layers with significantly different diffusion coefficients, and subsequent phase transition from a carbon quasi-liquid to graphene layer.
Databáze: OpenAIRE