Monolithic integration of a light‐emitting diode array and a silicon circuit using transfer processes

Autor:	Paul M. Zavracky, R.W. McClelland, John C. C. Fan, Mark B. Spitzer, B. D. Dingle
Rok vydání:	1993
Předmět:	Materials science Physics and Astronomy (miscellaneous) Silicon business.industry chemistry.chemical_element Substrate (electronics) Integrated circuit Driver circuit Epitaxy law.invention chemistry law Logic gate Optoelectronics business Light-emitting diode Diode
Zdroj:	Applied Physics Letters. 62:2760-2762
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.109252
Popis:	This letter reports the attainment of a monolithically integrated light‐emitting diode array on a silicon integrated circuit. The emitters are first formed epitaxially on a lattice‐matched substrate and are subsequently transferred to the silicon. Interconnections are made using thin‐film techniques between the 128 separately addressable light‐emitting diodes and the driver circuit. This work demonstrates attainment of a high level of optoelectronic/logic integration.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c265932ba926f4f62fd4542a653ed324 https://doi.org/10.1063/1.109252 Zobrazit plný text záznamu