Development of a dielectric-barrier discharge enhanced microplasma jet

Autor:	Hiroyuki Miyazoe, Jai Hyuk Choi, Masaki Sai, Kazuo Terashima, Takaaki Tomai, Shinya Kiriu, Fumitoshi Takamine
Rok vydání:	2009
Předmět:	Jet (fluid) Electron density Physics and Astronomy (miscellaneous) Microplasma Chemistry Emission spectrum Plasma Dielectric barrier discharge Dielectric Atomic physics Volumetric flow rate
Zdroj:	Applied Physics Letters. 94:191502
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.3130183
Popis:	A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400–1000 K and 1013–1014 cm−3, respectively.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c250667bec14915c24d9084a21fb9182 https://doi.org/10.1063/1.3130183 Zobrazit plný text záznamu