Automated (S)TEM metrology characterization of gate-all-around and 3D NAND devices
| Autor: | Michael Strauss, Chen Li, Chris Hakala, Xiaoting Gu, Antonio Mani, Zhenxin Zhong |
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| Rok vydání: | 2023 |
| Zdroj: | Metrology, Inspection, and Process Control XXXVII. |
| DOI: | 10.1117/12.2658795 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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