| Popis: |
A joint research and development effort focusing on the design of steady state, intense ion sources has been in progress for the past four and a half years. The ultimate goal is to meet the two, energy extreme range needs of mega‐electron‐volt and 100’s of electron‐volt ion implanters. This endeavor has resulted in record steady state output currents of higher charge state Antimony and Phosphorous ions: P2+ (8.6 pmA), P3+ (1.9 pmA), and P4+ (0.12 pmA) and 16.2, 7.6, 3.3, and 2.2 pmA of Sb3+ Sb4+, Sb5+, and Sb6+ respectively. During the past year the effort was channeled towards low energy implantation, for which the effort involved molecular ions and a novel plasmaless/gasless deceleration method. To date, 3 emA of positive Decaborane ions were extracted at 14 keV and a smaller current of negative Decaborane ions were also extracted. Additionally, a Boron fraction of over 70% was extracted from a Bernas‐Calutron ion source.A joint research and development effort focusing on the design of steady state, intense ion sources has been in progress for the past four and a half years. The ultimate goal is to meet the two, energy extreme range needs of mega‐electron‐volt and 100’s of electron‐volt ion implanters. This endeavor has resulted in record steady state output currents of higher charge state Antimony and Phosphorous ions: P2+ (8.6 pmA), P3+ (1.9 pmA), and P4+ (0.12 pmA) and 16.2, 7.6, 3.3, and 2.2 pmA of Sb3+ Sb4+, Sb5+, and Sb6+ respectively. During the past year the effort was channeled towards low energy implantation, for which the effort involved molecular ions and a novel plasmaless/gasless deceleration method. To date, 3 emA of positive Decaborane ions were extracted at 14 keV and a smaller current of negative Decaborane ions were also extracted. Additionally, a Boron fraction of over 70% was extracted from a Bernas‐Calutron ion source. |
