Effective method to improve measurement accuracy of sidewall angle of silica optical waveguides

Autor:	Hongpeng Shang, Chun-hong Zeng, DeGui Sun, Huilin Jiang, Ting Yu, Tian-cheng Li
Rok vydání:	2020
Předmět:	Accuracy and precision Optics Materials science business.industry Effective method business Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics and Precision Engineering. 28:2588-2595
ISSN:	1004-924X
DOI:	10.37188/ope.20202812.2588
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c1e450c82ab720992c607aead0373aea https://doi.org/10.37188/ope.20202812.2588 Zobrazit plný text záznamu