Tin Oxide Gas Sensing Microsensors from Metallo-Organic Deposited (MOD) Thin Films

Autor:	David Byrum Hicks, Adolph L. Micheli, Shih-Chia Chang
Rok vydání:	2008
Předmět:	Materials science Analytical chemistry Nanotechnology Photoresist Thin film Tin oxide Electromigration
Zdroj:	14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10
DOI:	10.1002/9780470320419.ch9
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c1c68693b09bdee9aef74ce0188279bf https://doi.org/10.1002/9780470320419.ch9 Zobrazit plný text záznamu