Autor:	Sangeeth Kallatt, Navakanta Bhat, Smitha Nair, M. N. Vijayaraghavan
Rok vydání:	2014
Předmět:	Materials science chemistry Chemical engineering Plasma-enhanced chemical vapor deposition Nanosensor Nano chemistry.chemical_element Nanotechnology Germanium Dewetting Lithography Volumetric flow rate Chamber pressure
Zdroj:	Physics of Semiconductor Devices ISBN: 9783319030012
DOI:	10.1007/978-3-319-03002-9_184
Popis:	A systematic study of Gold catalyzed growth of Ge nanoneedles by PECVD at low temperatures (
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c1baa5826beef403382d11a2e949e7fb https://doi.org/10.1007/978-3-319-03002-9_184 Zobrazit plný text záznamu