Ba0.6Rb0.4 BiO Thin Films by RF Magnetron Sputtering

Autor:	Yuzuru Mitani, Fumihiko Toda, Heizo Tokutaka, Hiroyuki Naoe, Satoru Kishida
Rok vydání:	1998
Předmět:	Diffraction Materials science X-ray photoelectron spectroscopy Analytical chemistry Substrate (electronics) Thin film High-power impulse magnetron sputtering Sputter deposition
Zdroj:	Advances in Superconductivity X ISBN: 9784431668817
Popis:	We prepared the BaRbBiO(BRBO) thin films by rf magnetron sputtering using He+O2 gas(He=80%) at the substrate temperatures(Tsub) from room temperature(RT) to 450°C. The MgO(100) substrate was set at the position perpendicular to the target. From the results of X-ray photoelectron spectroscopy, we found that the BRBO films prepared at the Tsub from RT to 450°C contained Ba, Rb, Bi and O. In addition, X-ray diffraction results indicated that the films were (100) and (110)-oriented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c1a2185cacd8c36e52fe2ce09c03e660 https://doi.org/10.1007/978-4-431-66879-4_239 Zobrazit plný text záznamu